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Epitaxial growth system

Corresponding to the high-vacuum and the high-speed rotating in Epitaxial growth system.

In Epitaxial growth system, a crystalline film is grown on a substrate which is rotated at the high-speed in the high vacuum atmosphere.

Suitable seals for Epitaxial growth system

Electrodes should be conducted through center hole of magnetic seals in Epitaxial growth system. So, we recommend adopting magnetic seals of Standard series, F1T-B, and Cantilever series, F1T-C. They have large inner diameter hollow shafts.


Please be careful about temperature range and gas of environment when you choose magnetic seals.
We can expand the inner diameter of the shaft of the magnetic seal.
We have experience of making magnetic seals which have a large inner diameter of the shaft (Max inner diameter: 300mm)
Please tell us required shape and load from here.
We will advise you the best solution.

Other applications

Roll-to-roll processing equipment / Vacuum transport robot / CVD equipment / Sputtering systems / Ion implanter / Single crystal growth / Vacuum chuck mechanism / Vacuum furnace / Pressurized furnace / Etching systems / X-ray generator / Stirrer / Gas induction mechanism / Arc discharger

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